Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effects on the properties of deposited thin films by direct current magnetron sputtering-Reference-Cited by-同舟云学术

Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effects on the properties of deposited thin films by direct current magnetron sputtering

Published:2010-08 Issue:21 Volume:518 Page:6071-6075
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Huang H.S.,Tung H.C.,Chiu C.H.,Hong I.T.,Chen R.Z.,Chang J.T.,Lin H.K.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

2. High rate direct current magnetron sputtered and texture-etched zinc oxide films for silicon thin film solar cells

3. Transparent conducting oxide films for thin film silicon photovoltaics

4. Application of Stacked ZnO Films as a Window Layer to Cu(InGa)Se2-Based Thin-Film Modules

5. The potential of textured front ZnO and flat TCO/metal back contact to improve optical absorption in thin Cu(In,Ga)Se2 solar cells

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