Improving the microstructure and properties of PZT thin films via annealing prepared by RF magnetron sputtering using Pb(Zr0.52Ti0.48)O3 target-Reference-Cited by-同舟云学术

Improving the microstructure and properties of PZT thin films via annealing prepared by RF magnetron sputtering using Pb(Zr0.52Ti0.48)O3 target

Published:2023-04 Issue:8 Volume:49 Page:12912-12924
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Thongrit Pakinee^ORCID,Chananonnawathorn Chanunthorn,Horprathum Mati^ORCID,Triamnak Narit,Lertvanithphol Tossaporn,Eitssayeam Sukum,Pengpat Kamonpan,Bintachitt Patamas

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Fabrication and characterization of microcantilever integrated with PZT thin film sensor and actuator;Dong;Thin Solid Films,2007

2. A giant electrocaloric effect in nanoscale antiferroelectric and ferroelectric phases coexisting in a relaxor Pb0.8Ba0.2ZrO3 thin film at room temperature;Peng;Adv. Funct. Mater.,2013

3. Hierarchically ordered nano-heterostructured PZT thin films with enhanced ferroelectric properties;Datta;Adv. Funct. Mater.,2014

4. Ferroelectric ceramics: history and technology;Haertling;J. Am. Ceram. Soc.,1999

5. A 2-D MEMS scanning mirror using piezoelectric PZT beam actuators;Koh;Procedia Chem.,2009

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