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A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators

  • Published:2009-09 Issue:1 Volume:1 Page:1303-1306
  • ISSN:1876-6196
  • Container-title:Procedia Chemistry
  • language:en
  • Short-container-title:Procedia Chemistry

Author:

Koh Kah How,Kobayashi Takeshi,Hsiao Fu-Li,Lee Chengkuo

Publisher

Elsevier BV

Subject

General Medicine

Reference9 articles.

1. MEMS-based pico projector display;Davis;Optical MEMS and Nanophotonics 2008 IEEE/LEOS Int. Conf.,2008

2. Two-dimensional MEMS scanner for dual-axes confocal microscopy;Ra;J. Microelectromech. Syst.,2007

3. Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners;Kiang;9th IEEE Workshop MEMS ’96, 11-15 Feb.,1996

4. A novel electrostatic microactuator for large deflection in MEMS applications;Singh;Thin Solid Films,2006

5. Surface and bulk micromachined two-dimensional scanner driven by angular vertical comb actuators;Piyawattanametha;J. Microelectromech. Syst.,2005

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1. Improving the microstructure and properties of PZT thin films via annealing prepared by RF magnetron sputtering using Pb(Zr0.52Ti0.48)O3 target;Ceramics International;2023-04

2. Modelling and Experimental Validation of Piezoelectrically Driven Micro-Lens Actuator;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20

3. Development of a new piezoelectric galvanometer scanner: fabrication, operation, and measurements;Smart Materials and Structures;2021-05-31

4. Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

5. Low-Cost Two-Dimensional Laser Scanning Projection Technology;Laser & Optoelectronics Progress;2021
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