Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application-Reference-Cited by-同舟云学术

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Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application

Published:2020-04 Issue:5 Volume:46 Page:5765-5772
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Qiu Peng,Wei Huiyun,An Yunlai,Wu Qixin,Du Wenxin,Jiang Zengxuan,Zhou Lang,Gao Chuang,Liu Sanjie,He Yingfeng,Song Yimeng,Peng Mingzeng,Zheng Xinhe

Funder

China Postdoctoral Science Foundation

Fundamental Research Funds for the Central Universities

Beijing Municipal Natural Science Foundation

Youth Innovation Promotion Association of the Chinese Academy of Sciences

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference50 articles.

1. Improved InGaN/GaN light-emitting diodes with a p-GaN/n-GaN/p-GaN/n-GaN/p-GaN current-spreading layer;Zhang;Opt. Express,2013

2. Growth and field emission properties of GaN nanopencils;Cui;Ceram. Int.,2015

3. High-performance GaN vertical fin power transistors on bulk GaN substrates;Sun;IEEE Electron. Device Lett.,2017

4. GaN power transistors on Si substrates for switching applications;Ikeda;Proc. IEEE,2010

5. Synthesis of gallium nitride and related oxides via ammonobasic reactive sublimation (ARS);Hernández-Hernández;Mater. Res.,2017

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2. Investigation into the growth mode of GaN thin films on 4H–SiC substrates via plasma-enhanced atomic layer deposition;Vacuum;2024-03

3. Atomic layer deposition and application of group III nitrides semiconductor and their alloys;Acta Physica Sinica;2024

4. Effect of AlN/GaN supercycle ratio on properties of AlxGa1−xN films using super-cycle plasma enhanced atomic layer deposition;Journal of Alloys and Compounds;2024-01

5. The effects of thickness and doping concentration on the solar efficiency of GaN/p-Si based solar cells;Chalcogenide Letters;2023-09-20

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