Effect of YF3 on fluorocarbon plasma resistance of Y2O3–Al2O3–B2O3 glasses
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Elsevier BV
Reference25 articles.
1. Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses;Park;J. Asian Ceram. Soc.,2021
2. Effects of artificial pores and purity on the erosion behaviors of polycrystalline Al2O3 ceramics under fluorine plasma;Kim;J. Ceram. Soc. Jpn.,2009
3. Plasma resistant glass (PRG) for reducing particulate contamination during plasma etching in semiconductor manufacturing: a review, Mater;Choi;Today Commun,2023
4. Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar+;Choi;J. Non-Cryst. Solids,2019
5. X-Ray photoelectron spectroscopy study on the interaction of yttrium-aluminum oxide with fluorine based plasma;Kim;J. Am. Ceram. Soc.,2011
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