Comparative study of the sintering process and thin film sputtering of AZO, GZO and AGZO ceramics targets-Reference-Cited by-同舟云学术

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Comparative study of the sintering process and thin film sputtering of AZO, GZO and AGZO ceramics targets

Published:2014-09 Issue:8 Volume:40 Page:12905-12915
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Liu Jia,Zhang Weijia,Song Dengyuan,Ma Qiang,Zhang Lei,Zhang Hui,Ma Xiaobo,Song Haiyang

Funder

National High-Tech Research and Development Projects (863)

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Influence of oxygen partial pressure on structural, electrical, and optical properties of Al-doped ZnO film prepared by the ion beam co-sputtering method;Chen;J. Mater. Sci.,2012

2. Physical properties and heterojunction device demonstration of aluminum-doped ZnO thin films synthesized at room ambient via sol–gel method;Karaagac;J. Alloys Compd.,2012

3. Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials;Lee;Appl. Surf. Sci.,2012

4. Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread;Jung;Ceram. Int.,2012

5. Combined effect of the target composition and deposition temperature on the properties of ZnO:Ga transparent conductive oxide films in pulsed dc magnetron sputtering;Lee;Semicond. Sci. Technol.,2011

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1. ZnO thin films co-doped with III-valence metals and halogens: theory and experiment;Physica Scripta;2024-09-09

2. Exploring the Effect of the Density of $$\textbf{Y}_{0.5} \textrm{Gd}_{0.5} \textrm{Ba}_2 \textrm{Cu}_3 \textrm{O}_{7-\delta }$$ Target on Superconducting Thin Films;Journal of Superconductivity and Novel Magnetism;2024-04-13

3. Comprehensive characterization of Al-doped ZnO thin films deposited in confocal radio frequency magnetron co-sputtering;Thin Solid Films;2023-09

4. Fabrication of Segments for ZnO-Based Tube Ceramic Targets by the Spark Plasma Sintering Method;Ceramics;2023-06-21

5. Structural, electro-optical and nonlinear optical properties of sputtered titanium–gallium co-doped zinc oxide transparent semiconductor films;Journal of Materials Science: Materials in Electronics;2023-06

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