Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon
Author:
Funder
National Defence Scientific Research of China
Publisher
Elsevier BV
Subject
Mechanical Engineering,Aerospace Engineering
Reference17 articles.
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3. An ab initio study of the cleavage anisotropy in silicon;Pérez;Acta Mater,2000
4. Defect-free fabrication for single crystal silicon substrate by chemo-mechanical grinding;Zhou;Ann CIRP,2006
5. Response of machining-damaged single crystalline silicon wafers to nanosecond pulsed laser irradiation;Yan;Semicond Sci Technol,2007
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