Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure-Reference-Cited by-同舟云学术

Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure

Published:1998-06 Issue:1-2 Volume:49 Page:88-92
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Guidi Vincenzo,Carlo Cardinali Gian,Dori Leonello,Faglia Guido,Ferroni Matteo,Martinelli Giuliano,Nelli Paolo,Sberveglieri Giorgio

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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3. P.T. Moseley, A.M. Stoneham, D.E. Williams, in: P.T. Moseley, J. Norris, D.E. Williams (Eds.), Techniques and Mechanisms in Gas Sensing, The Adam Hilger Series, Bristol, 1991, p. 111.

4. M. Ferroni, V. Guidi, G. Martinelli, P. Nelli, M. Sacerdoti, G. Sberveglieri, Thin Solid Films 307 (1997) 148–151.

5. Thin membranes with optimized thermomechanical properties for microsystem applications;George;Sensors and Actuators B,1995

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