Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol–gel, thermal evaporation and r.f. sputtering techniques-Reference-Cited by-同舟云学术

Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol–gel, thermal evaporation and r.f. sputtering techniques

Published:2000-06 Issue:1-3 Volume:64 Page:182-188
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Cantalini C.,Wlodarski W.,Li Y.,Passacantando M.,Santucci S.,Comini E.,Faglia G.,Sberveglieri G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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2. Highly sensitive ozone sensor;Takada;Sens. Actuators, B,1993

3. Sol–gel prepared In2O3 thin films for ozone sensing;Wlodarski,1997

4. Ozone sensing properties of In2O3 based metal oxide semiconductor thick films;Kim,1998

5. G. Faglia, B. Allieri, E. Comini, L.E. Depero, L. Sangaletti, G. Sberveglieri, Electrical and structural properties of RGTO In2O3 sensors for ozone detection, to be published in Sens. Actuators, B.

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