Author:
Takada Tadashi,Suzuki Kengo,Nakane Masanori
Subject
Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. O3 gas sensor of thin film semiconductor In2O3;Takada;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987
Cited by
140 articles.
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