Thick oxidised porous silicon layer as a thermo-insulating membrane for high-temperature operating thin- and thick-film gas sensors-Reference-Cited by-同舟云学术

Thick oxidised porous silicon layer as a thermo-insulating membrane for high-temperature operating thin- and thick-film gas sensors

Published:1998-06 Issue:1-2 Volume:49 Page:22-29
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Maccagnani P.,Angelucci R.,Pozzi P.,Poggi A.,Dori L.,Cardinali G.C.,Negrini P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Porous silicon membranes for gas-sensor applications;Taliercio;Sensors and Actuators A,1995

2. A. Poggi, R. Angelucci, L. Dori, A. Parisini, P. Maccagnani, F. Corticelli, C. Critelli, G. Faglia, G. Sberveglieri, Advanced, microsensor technology using porous silicon layers permeated with Sn–V mixed oxides, in: Proc. of the Tenth European Conference on Solid-State Transducers (EUROSENSORS), Leuven Belgium, Sept. 8–11, 1996, pp. 1511–1514.

3. G.M. O'Halloran, P.M. Sarro, J. Groeneweg, P.J. Trimp, P.J. French, A bulk micromachined humidity sensor based on porous silicon, in: Tech. Digest, IXth Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, June 16–19, 1997.

4. Porous silicon technology for thermal sensors;Lang;Sensors Mater.,1996

5. FIPOS (full isolation by porous oxidized silicon) technology and its application to LSI's;Imai;IEEE Trans. Elect. Dev.,1994

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