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Internal stress analysis of electroplated films based on electron theory

  • Published:2016-09 Issue:9 Volume:26 Page:2413-2418
  • ISSN:1003-6326
  • Container-title:Transactions of Nonferrous Metals Society of China
  • language:en
  • Short-container-title:Transactions of Nonferrous Metals Society of China

Author:

REN Feng-zhang,YIN Li-tao,WANG Shan-shan,XIONG Yi,VOLINSKY A.A.,TIAN Bao-hong,WEI Shi-zhong

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Geotechnical Engineering and Engineering Geology,Condensed Matter Physics

Reference17 articles.

1. Comparison of intrinsic residual stress models in metallic thin films [J];GUISBIERS;Scripta Mater,2009

2. Intrinsic stress of polycrystalline and epitaxial thin metal films [J];KOCH;J Phys Condens Matter,1994

3. Stress and grain growth in thin films [J];THOMPSON;J Mech Phys Solids,1996

4. Comparing internal stress in diamond-like carbon films with different structure [J];WANG;Thin Solid Films,2007

5. On the mechanism of the solia films roll up into nanotubes [J];CHENG;Rare Metal Mat Eng,2003

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