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Easy calibration method of vision system for in-situ measurement of strain of thin films

  • Published:2009-09 Issue: Volume:19 Page:s243-s249
  • ISSN:1003-6326
  • Container-title:Transactions of Nonferrous Metals Society of China
  • language:en
  • Short-container-title:Transactions of Nonferrous Metals Society of China

Author:

PARK Jun-Hyub,KANG Dong-Joong,SHIN Myung-Soo,LIM Sung-Jo,YU Son-Cheol,LEE Kwang-Soo,HA Jong-Eun,CHOA Sung-Hoon

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Geotechnical Engineering and Engineering Geology,Condensed Matter Physics

Reference26 articles.

1. The mechanical properties of thin films: a review [J];HARDWICK;Thin Solid Film,1987

2. Mechanical properties of thin films [J];NIX;Metal Trans A,1989

3. Specimen size effect on tensile strength of surface micro-machined polycrystalline silicon thin-films [J];TSUCHIYA;Journal of Microelectromechanical System,1998

4. Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension [J];ESPINOSA;Journal of Mechanical Physics Solids,2004

5. Mechanical properties of MEMS materials, the MEMS handbook [M];SHARPE,2001

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