Analyses of composition and chemical shift of silicon oxynitride film using energy-filtering transmission electron microscope based spatially resolved electron energy loss spectroscopy-Reference-Cited by-同舟云学术

Analyses of composition and chemical shift of silicon oxynitride film using energy-filtering transmission electron microscope based spatially resolved electron energy loss spectroscopy

Published:1999-04 Issue:2 Volume:30 Page:121-127
ISSN:0968-4328
Container-title:Micron
language:en
Short-container-title:Micron

Author:

Kimoto K,Kobayashi K,Aoyama T,Mitsui Y

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference14 articles.

1. Conduction bandstructure in strained silicon by spatially resolved electron energy loss spectroscopy;Batson;Ultramicroscopy,1995

2. Experimental energy-loss function Im[−1/ε(q,ω) for aluminum;Batson;Phys. Rev. B,1983

3. Chemistry of grain boundaries in calcia doped silicon nitride studied by spatially resolved electron energy-loss spectroscopy;Bruley;Analytica Chimica Acta,1994

4. New trends in STEM-based nano-EELS analysis;Colliex;J. Electron Microsc.,1996

5. Electron Energy-loss Spectroscopy in the Electron Microscope;Egerton,1986

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low-temperature direct bonding of silicon nitride to glass;RSC Advances;2018

2. Dynamical observation of lithium insertion/extraction reaction during charge–discharge processes in Li-ion batteries byin situspatially resolved electron energy-loss spectroscopy;Microscopy;2015-09-02

3. Transmission electron microscopy study of silica reinforced polybenzimidazole membranes;Journal of Membrane Science;2015-03

4. Bonding Behavior and Chemical Stability of Silica-Based Nanotubes and Their 3D Assembly;The Journal of Physical Chemistry C;2014-04-15

5. Nanoscale interaction layer at the interface between Al films and SiO2 substrates of Al/AlOx/Al Josephson tunnel junctions;Journal of Applied Physics;2013-04-14