Subject
Spectroscopy,Process Chemistry and Technology,Computer Science Applications,Software,Analytical Chemistry
Reference17 articles.
1. HIPPOCRATES: a methodology for IC process diagnosis;Spanos;Proc. ICCAD,1986
2. PIES: an engineer's do-it yourself knowledge system for interpretation of parametric test data;Pan,1986
3. Real-time diagnosis of semiconductor manufacturing equipment using a hybrid neural network expert system;Kim;IEEE Trans. Compon. Packag. Manuf. Technol.,1997
4. Model-based equipment diagnosis;Collins;SPIE,1994
5. Diagnosis of semiconductor manufacturing equipment and processes;Saxena;IEEE Trans. Semicond. Manuf.,1994
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