Investigation of Surface Formation Process of Silicon Molecular Beam Epitaxy by Atomic Force Microscopy
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference11 articles.
1. Manufacturing Process for Engineering Materials;Kalpakjin,1991
2. Polishing and Ultraprecision Machining of Semiconductor Substrate Materials;Venkatesh;Annals of the CIRP,1995
3. Molecular Beam Epitaxy (MBE) as an ultra precision machining process;Furukawa;Annals of the CIRP,1996
4. In-situ microscopy of MBE growth of GaAs and related materials;Inoue;Journal of Crystal Growth,1993
5. Topography of the Si(111) Surface during Silicon Molecular-Beam Epitaxy;Tung;Physical Review Letters,1989
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