Author:
Tomita Yoshiyuki,Makino Kenichi,Sugimine Masanobu,Taniguchi N.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference9 articles.
1. Bouwer, A. G. 1987, Positioning device. U. S. Patent, 4698575.
2. Accurate Motion Controller Design Based on an Extended Pole Placement Method and a Disturbance Observer;Brussel;Annals of the CIRP,1994
3. Step-and-Scan Lithography using Reduction Optics;Buckley;J. Vac. Sci. Technol.,1989
4. Basic Structure of Four-Phase PM-type Stepping Surface Motor and the Driving Method;Ebihara;T. IEE Japan,1991
5. Nanometer positioning and its micro-dynamics;Futami;Nanotechnology,1990
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