Highly Accurate Digital Processing of Large Stroke Guideway with an Optical Material-Corning Code 7972

Abstract

Currently, meter-long guideways rarely achieve an accuracy of dozens of nanometers due to processing difficulties such as the material and the edge effect. In this paper, we focus on this problem and propose a set of optimization processing methods to cope with it. In the grinding stage, a grinding tool is designed to improve the reciprocating processing and address the problem of warping; in the polishing stage, three different processes are compared, and the combination of magnetorheological finishing technology and the polyurethane disc technology process is purposed to reduce the polishing cycle and improve the surface figure accuracy. Moreover, through the combined process of magnetorheological finishing and smoothing, the edge effect and medium- and high-frequency error are essentially suppressed. The meter-long guideway is achieved with an accuracy of dozens of nanometers. Although the sizes of surface A/C and B/D are 1000 mm × 240 mm and 1000 mm × 160 mm, the surface figures are 20.33 nm, 22.78 nm, 39.23 nm and 26.58 nm RMS (Root Mean Square), respectively. The nanometer accuracy guideway is critical to an ultra-precision machine tool. Finally, the X-axis straightness of the profile measurement system formed by the guideway reaches 200 nm/600 mm.