Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes-Reference-Cited by-同舟云学术

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Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes

Published:2000 Issue:1 Volume:49 Page:101-104
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Kim S.G.,Koo M.K.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference7 articles.

1. MEMS Exchange, “What is MEMS Technology”, www.mems_exchange.org.

2. The Principles of Design;Suh,1990

3. Design of Thinking Design Machine;Suh;Annals of the CIRP,1990

4. Design of Software System based on Axiomatic Design;Kim;Annals of CIRP,1991

5. “Micromachined Thin-Film Mirror Array for Reflective Light Modulation,”;Kim;Annals of the CIRP,1997

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Axiomatic Design;CIRP Encyclopedia of Production Engineering;2019

2. Axiomatic Design;CIRP Encyclopedia of Production Engineering;2018

3. Axiomatic Design: Making the Abstract Concrete;Procedia CIRP;2016

4. Printing of uniform PZT thin films for MEMS applications;CIRP Annals;2013

5. Design of a microchannel system using axiomatic design theory for size-controllable and monodispersed microspheres by enhanced perturbation;The International Journal of Advanced Manufacturing Technology;2012-03-31

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