Micromachined Thin-Film Mirror Array for Reflective Light Modulation-Reference-Cited by-同舟云学术

Micromachined Thin-Film Mirror Array for Reflective Light Modulation

Published:1997 Issue:1 Volume:46 Page:455-458
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Kim Sang-Gook,Hwang Kyu-Ho,Choi Yoon-Joon,Min Yong-Ki,Bae Jung-Mok

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference7 articles.

1. Ji, J. B. et al., Thin Film Actuated Mirror Array, US Patent 5481396

2. Yoon, D. S., Thin Film Actuated Mirror Array Having An Improved Optical Efficiency, US Patent 5550680

3. A New Display Projection System;Um;SID International Symposium,1992

4. Kim, S. G., et al., TFAMA: The Device for the Brightest Large Projection Display, 1996, SEMICON/West96, San Francisco

5. Lober, T. A., Huang, J., Schmidt, M. A., and Senturia, S. D., Characterization of The Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements, June 1988, Hilton Head, SC, Tech. Dig., IEEE Solid-State Sensor and Actuator Workshop92–95

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single Point Micro Incremental Forming of Miniature Shell Structures;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2010

2. A structured approach to integrate MEMS and Precision Engineering methods;CIRP Journal of Manufacturing Science and Technology;2010-01

3. Creep behavior of undoped and La–Nb codoped PZT based micro-piezoactuators for micro-optical modulator applications;Sensors and Actuators A: Physical;2009-10

4. Dimensional Micro and Nano Metrology;CIRP Annals;2006

5. Micro Engineering;CIRP Annals;2003