Rigid XYθ Table for Ultraprecision Machine Tool Driven by Means of Walking Drive-Reference-Cited by-同舟云学术

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Rigid XYθ Table for Ultraprecision Machine Tool Driven by Means of Walking Drive

Published:1997 Issue:1 Volume:46 Page:301-304
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Shamoto Eiji,Moriwaki Toshimichi

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference6 articles.

1. Burleigh Instrument Inc. Catalog.

2. Precise Positioner Utilizing Rapid Deformations of a Piezoelectric Element (in Japanese), J. JSPE;Higuchi;54,1988

3. Ultraprecision Feed Systems Based on Walking Drive;Moriwaki;Annals of the CIRP,1996

4. Development of Ultra-precision Machining Center with Closed Loop Structure and Its Control;Sawada;Annals of the CIRP,1995

5. Shamoto, E. and Moriwaki, T., 1992, Walking Drive - A New Precision Feed Drive, Proc. of IMACS/SICE RM2S'92 Kobe 231–236

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