Development of Ultraprecision Machining Center with Closed-Loop Structure and Its Control
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference4 articles.
1. Micromachining Using Excimer Lasers;Tönshoff;Annals of the CIRP,1993
2. Effect of Cutting Heat on Machining Accuracy in Ultra-Precision Diamond Turning;Moriwaki;Annals of the CIRP,1990
3. Machining High-Precision Mirrors Using Newly Developed CNC Machine;Ueda;Annals of the CIRP,1991
4. Generation of Sculptured Surfaces by Means of an Ultraprecision Milling Machine;Takeuchi;Annals of the CIRP,1993
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3. Structural Design of a Bench-Type Ultra-Precision Machine Tool for Micro-Structured Optical Components;Key Engineering Materials;2007-12
4. New Machine Tools and Systems;Manufacturing Technologies for Machines of the Future;2003
5. Rigid XYθ Table for Ultraprecision Machine Tool Driven by Means of Walking Drive;CIRP Annals;1997
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