Thick TiN films prepared by vacuum arc deposition and high energetic nitrogen ion beam dynamic mixing implantation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
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3. Thermal stability of titanium nitride for shallow junction solar cell contacts
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5. Corrosion-resistant titanium nitride coatings formed on stainless steel by ion-beam-assisted deposition
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1. The effect of TiN nanoparticles deposition with different number of shots on SS316L by plasma focus device;Radiation Effects and Defects in Solids;2013-03
2. Improvement of corrosion and electrical conductivity of 316L stainless steel as bipolar plate by TiN nanoparticle implantation using plasma focus;International Journal of Hydrogen Energy;2012-10
3. Coating of Titanium Nitride on Stainless Steel Targets by a 4 kJ Plasma Focus Device;Journal of Fusion Energy;2011-11-16
4. Effects of bias on surface properties of TiN films fabricated by hollow cathode discharge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2007-07
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