Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
2 articles.
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1. Anomalously high yield of doubly charged Si ions sputtered from cleaned Si surface by keV neutral Ar impact;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-08
2. Estimates of differential sputtering yields for deposition applications;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001