Mechanisms of sputtered atoms energy spectra formation during ejection: Computer simulation study for two-component targets
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference24 articles.
1. Sputtering by Particle Bombardment 1;Robinson,1981
2. Mechanisms and theory of physical sputtering by particle impact
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