Dielectric properties of TiO2-films reactively sputtered from Ti in an RF magnetron
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference18 articles.
1. Infrared Absorption of Reduced Rutile TiO2Single Crystals
2. The Dielectric Properties of the Rutile Form of TiO2
3. C-V characteristics of metal-titanium dioxide-silicon capacitors
4. Kinetics of the Reactive Sputter Deposition of Titanium Oxides
5. Dielectric properties of sputtered TiO2 films
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