Hydrogen-ion implantation in GaAs
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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2. The structural evolution of light-ion implanted into GaAs single crystal after annealing;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2021-07
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