Author:
Gesheva K.A,Ivanova T,Gogova D,Beshkov G
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference14 articles.
1. Nicolet MA, Lau SS. VLSI electronics microstructure science. New York: Academic Press, 1983. p. 328.
2. d'Heurle FM, VLSI science and technology. In: Dell'Oca C, Bullis WM, editors. Penington, NJ: Electrochemical Society, 1982. p. 194.
3. Phase formation during reactive molybdenum-silicide formation
4. Impurity effects in molybdenum silicide formation
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