Effective electromechanical coupling coefficient (kt2) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film-Reference-Cited by-同舟云学术

Effective electromechanical coupling coefficient (kt2) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film

Published:2002-08 Issue:3-4 Volume:66 Page:463-466
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Takeuchi Masaki,Yamada Hajime,Yoshino Yukio,Makino Takahiro,Arai Seiichi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference6 articles.

1. Thin-Film Bulk Acoustic Resonators Employing ZnO/Pyrex-Glass Composite Diaphragm Structure

2. Film Bulk Acoustic Resonator Fabrication for Radio Frequency Filter Applications

3. Optimization of ZnO Piezoelectric Thin Films and Bottom Electrodes in Thin Film BulkAcoustic Wave Resonator

4. Finite element simulations of thin-film composite BAW resonators

5. The 150th Committee of Nihon gakujutsu shinkoukai danseiha soshi gijutu. Danseiha soshi gijutsu handobukku (Handbook of acoustic wave devise technology) 1991; Ohm-sya: Tokyo: p. 319–320 [in Japanese].

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