PLS based dEWMA run-to-run controller for MIMO non-squared semiconductor processes-Reference-Cited by-同舟云学术

PLS based dEWMA run-to-run controller for MIMO non-squared semiconductor processes

Published:2007-04 Issue:4 Volume:17 Page:309-319
ISSN:0959-1524
Container-title:Journal of Process Control
language:en
Short-container-title:Journal of Process Control

Author:

Chen Junghui,Wang Fan

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Modelling and Simulation,Control and Systems Engineering

Reference27 articles.

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5. Run by run process control: combining SPC and feedback control;Sachs;IEEE Trans. Semicond. Manuf.,1995

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