A survey of run-to-run control for batch processes-Reference-Cited by-同舟云学术

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A survey of run-to-run control for batch processes

Published:2018-12 Issue: Volume:83 Page:107-125
ISSN:0019-0578
Container-title:ISA Transactions
language:en
Short-container-title:ISA Transactions

Author:

Liu Kai,Chen YangQuan,Zhang Tao,Tian Siyuan,Zhang Xi

Publisher

Elsevier BV

Subject

Applied Mathematics,Control and Systems Engineering,Electrical and Electronic Engineering,Computer Science Applications,Instrumentation

Reference172 articles.

1. On-line process optimization and control using the sequential design of experiments;Sachs,1990

2. Process control system for VLSI fabrication;Sachs;IEEE Trans Semicond Manuf,1991

3. Yield improvement at the contact process through run-to-run control;Khan,1999

4. Statistical process adjustment for quality control, vol. 369;Del Castillo,2002

5. Run-to-run control in semiconductor manufacturing;Moyne,2000

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