Feature scale transport and reaction during low-pressure deposition processes-Reference-Cited by-同舟云学术

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Feature scale transport and reaction during low-pressure deposition processes

Published:1996 Issue: Volume: Page:175-276
ISSN:1079-4050
Container-title:Thin Films
language:
Short-container-title:

Author:

Cale Timothy S.,Mahadev Vadali

Publisher

Elsevier

Reference132 articles.

1. Evolution of Epitaxial Structure and Morphology;Challa,1996

2. Evolution of Thin Film and Surface Structure and Morphology;Challa,1995

3. Microstructural Evolution During the Early Stages of Deposition: Monte Carlo Simulations;Challa,1996

4. H. Liao and T. S. Cale, J. Vac. Sci. Technol. B, in press.

5. Experimental and simulation studies of thermal flow of borophosphosilicate and phosphosilicate glasses

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