Influence of initial crystalline phase of TiO2 to obtain TiN thin films from sol-gel route by rapid thermal nitridation process-Reference-Cited by-同舟云学术

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Influence of initial crystalline phase of TiO2 to obtain TiN thin films from sol-gel route by rapid thermal nitridation process

Published:2024-09 Issue: Volume:75 Page:100462
ISSN:0079-6786
Container-title:Progress in Solid State Chemistry
language:en
Short-container-title:Progress in Solid State Chemistry

Author:

Vallejo-Otero Victor,Valour Arnaud^ORCID,Bruhier Hugo,Bleu Yannick,Ollier Nadège,Gamet Emilie,Lefkir Yaya,Donnet Christophe,Crespo-Monteiro Nicolas,Jourlin Yves

Funder

CNRS

French National Research Agency

Publisher

Elsevier BV

Reference72 articles.

1. Synthesis of crystalline metal nitride and metal carbide nanostructures by sol–gel chemistry;Giordano;Nano Today,2011

2. Synthesis and application of nano-structured metal nitrides and carbides: a review;Rasaki;Prog Solid State Chem,2018

3. Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium;Sproul;J Vac Sci Technol A: Vacuum, Surfaces, and Films,1986

4. Morphology and mechanical properties of TiN coatings prepared with different PVD methods;Ming’e;Rare Met Mater Eng,2016

5. Characterization of reactively evaporated TiN layers for diffusion barrier applications;Gagnon;J Appl Phys,1994

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