Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom-Reference-Cited by-同舟云学术

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Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Published:2015-12 Issue: Volume:94 Page:287-295
ISSN:0360-1323
Container-title:Building and Environment
language:en
Short-container-title:Building and Environment

Author:

Jian Rih-Sheng,Wang Tse-Yu,Song Lung-Yu,Kuo Chun-Yen,Tian Wei-Cheng,Lo Ei-Wen,Lu Chia-Jung

Funder

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

Building and Construction,Geography, Planning and Development,Civil and Structural Engineering,Environmental Engineering

Reference32 articles.

1. Long-term concentrations of volatile organic compounds in a new apartment in Beijing, China;Liang;Build. Environ.,2014

2. Volatile organic compounds in different interior construction stages of an apartment;Liang;Build. Environ.,2014

3. Indoor air quality in passive and conventional new houses in Sweden;Langer;Build. Environ.,2015

4. Investigation of volatile organic compounds in office buildings in Bangkok, Thailand: concentrations, sources, and occupant symptoms;Ongwandee;Build. Environ.,2011

5. Measurements of volatile organic compounds in aircraft cabins. Part I: methodology and detected VOC species in 107 commercial flights;Guan;Build. Environ.,2014

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1. Growth and Characterization of Sputtered InAlN Nanorods on Sapphire Substrates for Acetone Gas Sensing;Nanomaterials;2023-12-21

2. Biomonitoring of Exposures to Solvents and Metals in Electronics Manufacturing Facilities in Batam, Indonesia;NEW SOLUTIONS: A Journal of Environmental and Occupational Health Policy;2023-12-19

3. Energy performance and energy conservation technologies for high-tech cleanrooms: State of the art and future perspectives;Renewable and Sustainable Energy Reviews;2023-09

4. Simultaneous Monitoring of ppmv Level Methane and ppbv Level VOCs Near Industrial Sources Using a Real-Time GC;2023-02-08

5. Structured packing improves wet scrubbing of airborne molecular contaminants in cleanroom make-up air units;Building and Environment;2022-10

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