Using phosphoric acid-impregnated activated carbon to improve the efficiency of chemical filters for the removal of airborne molecular contaminants (AMCs) in the make-up air unit (MAU) of a cleanroom-Reference-Cited by-同舟云学术

Using phosphoric acid-impregnated activated carbon to improve the efficiency of chemical filters for the removal of airborne molecular contaminants (AMCs) in the make-up air unit (MAU) of a cleanroom

Published:2010-04 Issue:4 Volume:45 Page:929-935
ISSN:0360-1323
Container-title:Building and Environment
language:en
Short-container-title:Building and Environment

Author:

Kang Y.-H.,Shiue A.,Hu S.-C.,Huang C.-Y.,Chen H.-T.

Publisher

Elsevier BV

Subject

Building and Construction,Geography, Planning and Development,Civil and Structural Engineering,Environmental Engineering

Reference24 articles.

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2. Airborne chemical contamination of a chemically amplified resist;MacDonald;Proc SPIE,1991

3. Development of ammonia adsorption filter and its application to LSI manufacturing environment;Saiki;Jpn J Appl Phys,1994

4. Forecast of airborne molecular contamination limits for the 0.25 micron high performance logic process;SEMATECH,1995

5. SEMI Standard F21-95. Classification of airborne molecular contaminant levels in clean environments;SEMI,1996

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