<title>Airborne chemical contamination of a chemically amplified resist

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Airborne chemical contamination of a chemically amplified resist

Published:1991-06-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Advances in Resist Technology and Processing VIII
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Author:

MacDonald Scott A.,Clecak Nicholas J.,Wendt H. R.,Willson C. Grant,Snyder Clinton D.,Knors C. J.,Deyoe N. B.,Maltabes John G.,Morrow James R.,McGuire Anne E.,Holmes Steven J.

Publisher

SPIE

Cited by 113 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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