Raman and Brillouin scattering spectroscopy studies of atomic layer-deposited ZrO2 and HfO2 thin films
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference33 articles.
1. Physical characterization of hafnium oxide thin films and their application as gas sensing devices
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3. Optical coatings deposited by reactive ion plating
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5. HfO2 films with high laser damage threshold
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