Design considerations of 10kW-scale, extreme ultraviolet SASE FEL for lithography
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
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2. kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation;Journal of Micro/Nanolithography, MEMS, and MOEMS;2017-11-24
3. Laser acceleration;RIV NUOVO CIMENTO;2017
4. A non-conventional ERL configuration for high-power EUV FELs;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2015-09
5. Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography;Physics-Uspekhi;2013-07-31
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