Selective epitaxial growth of by metal-organic vapour-phase epitaxy
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference11 articles.
1. GaAs/GaAlAs selective MOCVD epitaxy and planar ion-implantation technique for complex integrated optoelectronic circuit applications
2. A new selective MOVPE regrowth process utilizing in-situ vapor phase etching for optoelectronic integrated circuits
3. Summary Abstract: ‘‘In situ’’ contacts to GaAs based on InAs
4. Low Pressure Metalorganic Vapor Phase Epitaxy of InP in a Vertical Reactor
5. MOVPE growth of SiO2-masked InP structures at reduced pressures
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Fabrication of quantum wire structures by in-situ gas etching and selective-area metalorganic vapor phase epitaxy regrowth;Journal of Crystal Growth;1994-12
2. Facet growth of AlxGa1-xAs with HCl gas by metalorganic vapor phase epitaxy;Journal of Crystal Growth;1994-12
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