Effect of humidity conditions on active oxygen species generated under ultraviolet light irradiation and etching characteristics of fluorocarbon polymer-Reference-Cited by-同舟云学术

Effect of humidity conditions on active oxygen species generated under ultraviolet light irradiation and etching characteristics of fluorocarbon polymer

Published:2015-02 Issue: Volume:298 Page:33-39
ISSN:1010-6030
Container-title:Journal of Photochemistry and Photobiology A: Chemistry
language:en
Short-container-title:Journal of Photochemistry and Photobiology A: Chemistry

Author:

Oya Kei,Watanabe Ryota,Soga Yuta,Ikeda Yuki,Nakamura Takaharu,Iwamori Satoru

Funder

Japan Science and Technology AgencyJapan Science and Technology Agency (JST)

Publisher

Elsevier BV

Subject

General Physics and Astronomy,General Chemical Engineering,General Chemistry

Reference24 articles.

1. Behaviour of atomic oxygen in a pulsed dielectric barrier discharge measured by laser-induced fluorescence

2. Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

3. Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

4. Active oxygen sensors used a quartz crystal microbalance (QCM) with sputter-coated and spin-coated poly(tetrafluoroethylene) thin films

5. Monitoring of sterilization in an oxygen plasma apparatus, employing a quartz crystal microbalance (QCM) method

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