Micromachined pattern transfer into CVD diamond-Reference-Cited by-同舟云学术

Micromachined pattern transfer into CVD diamond

Published:1998-08 Issue:8 Volume:7 Page:1148-1154
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Jubber M.G,McLaughlin A.J,Marsh J.H,Aitchison J.S,John P,Troupe C.E,Wilson J.I.B

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. A. Bar-Cohen, in: R.C. Dorf (Ed.), The Electrical Engineering Handbook, CRC Press, Boca Raton, FL, 1993.

2. H. Kressel, M. Ettenberg, in: M.J. Weber (Ed.), CRC Handbook of Laser Science and Technology. Volume I, Lasers and Masers, CRC Press, Boca Raton, FL, USA, 1982, p. 199.

3. Anisotropic Etching of Silicon

4. Anisotropic etching of silicon

5. Design of a UHV reactor for microwave plasma deposition of diamond films

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