DC bias effects in the deposition of a-C:H films using the screen-grid method in electron cyclotron resonance chemical vapour deposition-Reference-Cited by-同舟云学术

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DC bias effects in the deposition of a-C:H films using the screen-grid method in electron cyclotron resonance chemical vapour deposition

Published:1998-08 Issue:8 Volume:7 Page:1213-1218
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Yoon S.F,Rusli ,Ahn J,Zhang Q,Wu Y.S,Yang H

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Hard amorphous (diamond-like) carbons

2. rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications

3. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon

4. Optical constants and associated functions of metastable diamondlike amorphous carbon films in the energy range 0.5–7.3 eV

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1. Electrical and Optical Properties of Si-Incorporated a-C:H Films via the Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Method;Journal of Nanoscience and Nanotechnology;2016-05-01

2. Effects of screen-grid bias voltage on the microstructure and properties of the ultrahigh molecular weight polyethylene (UHMWPE) modified by oxygen plasma;Vacuum;2012-07

3. Growth of Metal-Free Carbon Nanotubes on Glass Substrate with an Amorphous Carbon Catalyst Layer;Journal of Nanoscience and Nanotechnology;2011-12-01

4. Metal incorporation strategies in DLC (fullerene-like) thin films grown by ECR-CVD;Vacuum;2011-06

5. Electrochemical Impedance Characterization of Ultra-Thin Carbon Overcoats;ECS Transactions;2010-02-22

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