Metal incorporation strategies in DLC (fullerene-like) thin films grown by ECR-CVD
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference14 articles.
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2. Influence of external bias on the surface morphology of a-C: H films grown by electron cyclotron resonance chemical vapor deposition;Buijnsters;Surface and Coatings Technology,2007
3. Direct spectroscopic evidence of self-formed C60 inclusions in fullerene like hydrogenated carbon films;Buijnsters;Applied Physics Letters,2008
4. Tribological study of hydrogenated amorphous carbon films with tailored microstructure and composition produced by bias-enhanced plasma chemical vapour deposition;Buijnsters;Diamond and Related Materials,2010
5. Hard amorphous (diamond-like) carbons;Robertson;Progress in Solid State Chemistry,1991
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