Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. ULSI Technology;Chang,1996
2. Silicon Processing for the VLSI Era,;Wolf,1995
3. Examples: ‘Low-Dielectric Constant Materials I∼V’, Material Research Society Symposium Proceedings, Vols. 384, 443, 476, 511 and 565 (1995–1999).
4. The effect of hydrogen- and oxygen-plasma treatments on dielectric properties of amorphous carbon nitride films
Cited by
46 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献