Plasma enhanced deposition of silicon carbonitride thin films and property characterization
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Deposition of Diamond-Like Superhard Materials;Kulisch,1999
2. High-Rate Deposition of High-Quality, Thick Cubic Boron Nitride Films by Bias-Assisted DC Jet Plasma Chemical Vapor Deposition
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4. Hydrogenated Silicon Carbonitride Thin Film Nanostructuring Using SF6 Plasma: Structural and Optical Analysis;Silicon;2020-01-23
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