Mechanical behavior of laser micro-machined bulk 6H–SiC diaphragms
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,General Mathematics
Reference18 articles.
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1. Temperature dependence of mechanical properties and defect formation mechanisms in 3C-SiC: A molecular dynamics study;Computational Materials Science;2023-08
2. High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing;Ceramics International;2020-08
3. Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor;Sensors and Actuators A: Physical;2020-07
4. Profile Evolution of High Aspect Ratio Silicon Carbide Trenches by Inductive Coupled Plasma Etching;Journal of Microelectromechanical Systems;2017-02
5. Structural and photoelectrical characteristics of Si/6H-SiC heterojunctions prepared by hot-wall chemical vapor deposition;Materials Science in Semiconductor Processing;2013-12
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