Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2-Reference-Cited by-同舟云学术

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Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

Published:2016-03 Issue: Volume:94 Page:230-239
ISSN:0264-1275
Container-title:Materials & Design
language:en
Short-container-title:Materials & Design

Author:

Pshyk A.V.,Coy L.E.,Yate L.,Załęski K.,Nowaczyk G.,Pogrebnjak A.D.,Jurga S.

Funder

National Centre for Research and Development

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference48 articles.

1. Growth and characterization of TiAlN∕CrAlN superlattices prepared by reactive direct current magnetron sputtering;Barshilia;J. Vac. Sci. Technol. A Vac., Surf., Film.,2009

2. Different approaches to superhard coatings and nanocomposites;Veprek;Thin Solid Films,2005

3. Reactive magnetron sputtering of thin films: present status and trends;Musil;Thin Solid Films,2005

4. Influence of the negative R.F. bias voltage on the structural, mechanical and electrical properties of Hf–C–N coatings;Piedrahita;Surf. Coat. Technol.,2016

5. Hard and superhard nanocomposite coatings;Musil;Surf. Coat. Technol.,2000

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