Selective Epitaxy of Germanium on silicon for the fabrication of CMOS compatible short-wavelength infrared photodetectors
-
Published:2024-06
Issue:
Volume:176
Page:108308
-
ISSN:1369-8001
-
Container-title:Materials Science in Semiconductor Processing
-
language:en
-
Short-container-title:Materials Science in Semiconductor Processing
Author:
Ryzhak DianaORCID,
Corley-Wiciak Agnieszka Anna,
Steglich Patrick,
Yamamoto Yuji,
Frigerio Jacopo,
Giani Raffaele,
De Iacovo Andrea,
Spirito Davide,
Capellini Giovanni