High dielectric constant TiO2 film grown on polysilicon by liquid phase deposition
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference18 articles.
1. Polysilicon thin-film transistors with channel length and width comparable to or smaller than the grain size of the thin film
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3. Plasma enhanced chemical vapor deposition of TiO2 in microwave‐radio frequency hybrid plasma reactor
4. Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition
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