Single lithography-step self-aligned fabrication process for Vertical-Cavity Surface-Emitting Lasers

Author:

Marigo-Lombart Ludovic,Arnoult Alexandre,Mazenq Laurent,Dubreuil Pascal,Reig Benjamin,Mauran Nicolas,Thienpont Hugo,Panajotov Krassimir,Almuneau Guilhem

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference17 articles.

1. M. Grabherr, in: Proceedings of the SPIE 9381, Vertical-Cavity Surface-Emitting Lasers XIX, 938102, 2015.

2. VCSELs with a self-aligned contact and copper-plated heatsink

3. Efficient semiconductor ring lasers made by a simple self-aligned fabrication process

4. S. Kim, J. Park, C. Kim, S. Kim, I. Song, H. Yin, J. Lee, E. Lee, Y. Park, 241th ECS meeting, The Electrochemical Society, 2008.

5. A comparative study on inductively-coupled plasma high-density plasma, plasma-enhanced, and low pressure chemical vapor deposition silicon nitride films

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